X-Y Positioner Driven By Electrostatic Motor

• NIINO T.

Journal

• Conference Record of the 1996 IEEE IAS 31st Annual Meeting

  Conference Record of the 1996 IEEE IAS 31st Annual Meeting 1974-1979, 1996

Details

• CRID: 1571135649234029184
• NII Article ID: 10004071425
• Data Source:
  • CiNii Articles