Characterization of a Ti vacuum arc and the structure of deposited Ti and TiN films

• MARTIN P. J.

収録刊行物

• J. Vac. Sci. Technol. A

  J. Vac. Sci. Technol. A 5 22-, 1987

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• CRID: 1570009749324449664
• NII論文ID: 10004165699
• データソース種別:
  • CiNii Articles