Off-axis Excimer laser deposition of Ta_2O_5 Thin Films

• INOUE N.

収録刊行物

• Third International Conf. on Laser Ablation

  Third International Conf. on Laser Ablation (4), 1995

  strasbourg

詳細情報

• CRID: 1573105974068252160
• NII論文ID: 10004165967
• データソース種別:
  • CiNii Articles