N_2 fixation and Ti evaporation at optimum pressure for TiN coating by the vacuum arc deposition method

• TAKIKAWA H.

収録刊行物

• Proceedings of The 2nd Asia-Pacific Conference on Plasma Science & Technology

  Proceedings of The 2nd Asia-Pacific Conference on Plasma Science & Technology 1994

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• CRID: 1573950398998164608
• NII論文ID: 10004168820
• データソース種別:
  • CiNii Articles