誘導電荷のフィードバックによる圧電素子の変位制御

• 古谷 克司

  正会員 豊田工業大学

• 漆畑 満則

  学生会員 豊田工業大学

• 毛利 尚武

  正会員 豊田工業大学

書誌事項

タイトル別名

• Displacement Control of Piezoelectric Element by Induced Charge Feedback.
• ユウドウ デンカ ノ フィードバック ニヨル アツデン ソシ ノ ヘンイ セイ

抄録

This paper deals with a displacement control method of a piezoelectric actuator (piezo). When voltage is applied to conductive plates which are attached on both ends of a piezo, charges are induced on the conductive plates. This induced charge indicates the deformation of the piezo. Since the relationship between the deformation of the piezo and the induced charge has fewer hysteresis, the displacement of the piezo can be measured by observing the induced charge. In case of step response, the displacement of the piezo can be controlled by the feedback of the induced charge as well as by a feedback of the displacement with other measuring instruments. This method can be used at a high driving frequency since the piezo is driven with a voltage source with a low output impedance in this method. The frequency characteristics is compensated by inverse transfer function method to control the displacement for several seconds.

収録刊行物

• 精密工学会誌

  精密工学会誌 64 (4), 562-566, 1998

  公益社団法人 精密工学会

キーワード

• piezoelectric element
• feedback control
• positioning
• induced charge
• inverse transfer function compensation

詳細情報

• CRID: 1390282679741330560
• NII論文ID: 110001372424
• NII論文ID: 10004221715
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.64.562
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 4446870
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4446870
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可