Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch x-ray lithography

• HIRATA Y.

収録刊行物

• MEN'95 proceedings

  MEN'95 proceedings 191-196, 1995

詳細情報

• CRID: 1574231873958304384
• NII論文ID: 10004224955
• データソース種別:
  • CiNii Articles