Micro-EDM: A Versatile Technology for Silicon Micromachining
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- REYNAERTS Dominiek
- Department of Mechanical Engineering, Katholieke Universiteit Leuven
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- BRUSSEL Hendrik VAN
- Department of Mechanical Engineering, Katholieke Universiteit Leuven
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Journal
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 33 (2), 114-119, 1999-06-30
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Details 詳細情報について
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- CRID
- 1571698599162188416
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- NII Article ID
- 10004294558
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- NII Book ID
- AA1080710X
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- ISSN
- 0916782X
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- Text Lang
- en
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- Data Source
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- CiNii Articles