Shape Measurement of a Rough Step-like Surface using Three-wavelength Phase Shifting
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- ADACHI Masaaki
- Faculty of Engineering, Kanazawa University
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- INABE Katsuyuki
- Faculty of Engineering, Kanazawa University
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- KITAGAWA Youichi
- Hyogo Prefectural Institute of Industrial Research
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- MATSUMOTO Tetsuya
- Hyogo Prefectural Institute of Industrial Research
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Journal
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 33 (3), 245-247, 1999-09-30
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Keywords
Details 詳細情報について
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- CRID
- 1571698599162377472
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- NII Article ID
- 10004294759
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- NII Book ID
- AA1080710X
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- ISSN
- 0916782X
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- Text Lang
- en
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- Data Source
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- CiNii Articles