New Positive - Type Photosensitive Poly(phenylene ether): Poly(2 - hydroxy - 6 - methylphenol - co - 2, 6 - dimethylphenol) with Diazonaphthoquinone
A positive working thermally stable and photosensitive polymer based on poly(2-hydroxy-6-methylphenol-<I>co</I>-2,6-dimethyl phenol) (PHP-MP) and 2,3,4-tris[2-diazo-1(2H)-naphthalenone-4-sulfonyloxy] benzophenone (D4SB) as a photoreactive compound has been developed. The copolymer PHP-MP was prepared by oxidative coupling polymerization of 2-(tetrahydropyran-2-yl)oxy-6-methylphenol with 2,6-dimethylphenol, followed by acid treatment. The PHP-MP film showed excellent transparency above 300 nm. A clear positive pattern was obtained when it was exposed to 365 nm light, followed by developing with a 2.38% aqueous tetramethylammonium hydroxide (TMAH) solution at 25 °C.
- Chemistry letters
Chemistry letters 1999(5), 393-394, 1999-05-05
The Chemical Society of Japan