Thermal Desorption Spectroscopy of (Ba, Sr)TiO3 Thin Films Prepared by Chemical Vapor Deposition.

• Yamamuka Mikio

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation, 8–1–1 Tsukaguchi–Honmachi, Amagasaki, Hyogo 661, Japan

• Kawahara Takaaki

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation, 8–1–1 Tsukaguchi–Honmachi, Amagasaki, Hyogo 661, Japan

• Makita Tetsuro

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation, 8–1–1 Tsukaguchi–Honmachi, Amagasaki, Hyogo 661, Japan

• Yuuki Akimasa

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation, 8–1–1 Tsukaguchi–Honmachi, Amagasaki, Hyogo 661, Japan

• Ono Kouichi

  Semiconductor Research Laboratory, Mitsubishi Electric Corporation, 8–1–1 Tsukaguchi–Honmachi, Amagasaki, Hyogo 661, Japan

Bibliographic Information

Other Title

• Thermal Desorption Spectroscopy of (Ba, Sr)TiO₃ Thin Films Prepared by Chemical Vapor Deposition

Abstract

Thermal desorption characteristics of (Ba, Sr)TiO₃ [BST] thin films prepared by metalorganic chemical vapor deposition (CVD) using liguid sources have been studied, together with their crystallinity and electrical properties. Thermal desorption was observed for CO₂ at 400^° C and 900^° C, and CO at 600^° C. The intensities of the CO₂ peaks at 400^° C and 900^° C increased with the increasing atomic composition ratio of (Ba+Sr)/Ti, in relation to the excess Ba and Sr in the BST films; in particular, the CO₂ peak at 900^° C may originate from BaCO₃ and/or SrCO₃ lumps formed in the films, and the CO₂ peak at 400^° C may be attributed to gases adsorbed on the sites of contaminants such as BaO _x and/or SrO _x in films, due to excess Ba and Sr coming from the atmosphere after deposition. On the other hand, the CO peak at 600^° C occurred most strongly from BST films with high dielectric constants at (Ba+Sr)/Ti~ 1, or perovskite crystalline structures having large grains. Moreover, the desorption of CO at 600^° C was also observed from films kept in the atmosphere after annealed above 600^° C in vacuum. These results imply that the BST crystalline perovskite grains may have adsorption sites for CO from the atmosphere.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 35 (2A), 729-735, 1996

  The Japan Society of Applied Physics

Keywords

• DRAM
• LSI
• CVD
• (Ba
• Sr)TiO<SUB> 3</SUB>
• perovskite crystalline
• thermal desorption spectroscopy
• dielectric constant
• dielectric loss tangent
• BaCO<SUB> 3</SUB>
• SrCO<SUB> 3</SUB>

Details

• CRID: 1390001206245419136
• NII Article ID: 210000040133
• NII Article ID: 10004350503
• NII Article ID: 130004522343
• NII Book ID: AA10457675
• DOI: 10.1143/jjap.35.729
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.729
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.35.729/pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed