Electron Temperature Control in Large-Diameter Radio-Frequency Plasma

• Y. Li

Journal

• Proc. of 3rd Asia-Pacific Conf. On Plasma Sci Technol.

  Proc. of 3rd Asia-Pacific Conf. On Plasma Sci Technol. 435-439, 1996

Details

• CRID: 1573387449024585344
• NII Article ID: 10004440539
• Data Source:
  • CiNii Articles