SrAl<sub>2</sub>O<sub>4</sub>:Euスパッタ薄膜の作製と熱ルミネセンス特性

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タイトル別名
  • Preparation of Sputtered SrAl<sub>2</sub>O<sub>4</sub>: Eu Films and Thermoluminescence Properties
  • SrAl2O4:Euスパッタ薄膜の作製と熱ルミネセンス特性
  • SrAl2O4 Eu スパッタ ハクマク ノ サクセイ ト ネツ ルミネセンス

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抄録

SrAl2O4 activated with Eu, one of new fluorescent materials with long decay time, was deposited on Si substrates using an RF sputtering technique with facing targets. The as-deposited films did not show any peaks in the X-ray diffraction spectra or the photoluminescence was not observed. However, the X-ray diffraction peaks and a photoluminescent peak at about 520nm were observed after annealing in a reducing Ar+H2 gas and an inert Ar gas. The structure of the sputtered films was investigated using EDS and SEM. The thermoluminescence peaks were observed, and the lifetime of the fluorescence and the activation energies were calculated from the peaks. The results in this work are useful for the future applications.

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