In-situ high resolution TEM observation of nucleation of Si crystalline in SiO_2 layer at high temperatures
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- KAMINO T.
- Hitachi Science Systems, Ltd.
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- YAGUCHI T.
- Hitachi Science Systems, Ltd.
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- KOBAYASHI H.
- Hitachi Ltd., Instrument Div.
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- MORISAKI H.
- The University of Electro-Communications
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- NOZAKI S.
- The University of Electro-Communications
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- IZUMI T.
- Tokai University
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- IWASE M.
- Tokai University
Bibliographic Information
- Other Title
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- SiO_2膜中のSiナノ結晶成長の高分解能その場観察
Search this article
Journal
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- 電子顕微鏡
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電子顕微鏡 34 109-, 1999-05-01
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Details 詳細情報について
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- CRID
- 1570291224322016640
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- NII Article ID
- 10004538877
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- NII Book ID
- AN00145000
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- ISSN
- 04170326
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- Text Lang
- ja
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- Data Source
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- CiNii Articles