Suppression of stress migration in an Al film deposited on to a glass

• HARUTA K.

  Dept.of Quantum Engg., Nagoya-Univ.

• SUZUKI Y.

  Dept.of Quantum Engg., Nagoya-Univ.

• TAKATSUJI H.

  IBM Japan Ltd., Display Technology

• TUJIMOTO K.

  IBM Japan Ltd., Display Technology

• TSUJI S.

  IBM Japan Ltd., Display Technology

• SAKA H.

  Dept.of Quantum Engg., Nagoya-Univ.

Bibliographic Information

Other Title

• ガラス基板上のAl膜のストレスマイグレーションの制御

Journal

• 電子顕微鏡

  電子顕微鏡 34 114-, 1999-05-01

Details

• CRID: 1571135649252146176
• NII Article ID: 10004538894
• NII Book ID: AN00145000
• ISSN: 04170326
• Text Lang: ja
• Data Source:
  • CiNii Articles