Remote observation of fine sectional structure in electron devices with UHVEM through GEMnet

• TAKAOKA A.

  Research Center for Ultra-HVEM, Osaka Univ.

• FURUKAWA S.

  Research Center for Ultra-HVEM, Osaka Univ.

• KAKAMU H.

  Research Center for Ultra-HVEM, Osaka Univ.

• UEKI T.

  NTT Electronics Corporation

• TOMIZAWA M.

  NTT Lifestyle and Environmental Tech.Lab.

• MORI H.

  Research Center for Ultra-HVEM, Osaka Univ.

Bibliographic Information

Other Title

• ATM回線を介した超高圧電子顕微鏡による電子デバイス断面構造の遠隔観察

Journal

• 電子顕微鏡

  電子顕微鏡 34 182-, 1999-05-01

Details

• CRID: 1572261549158700160
• NII Article ID: 10004539067
• NII Book ID: AN00145000
• ISSN: 04170326
• Text Lang: ja
• Data Source:
  • CiNii Articles