TEM Sample Fablication using Thin Polymer Film as Protection Material

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Bibliographic Information

Other Title
  • 高分子保護膜を塗布したFIB加工方法の検討

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Details 詳細情報について

  • CRID
    1572543024135356416
  • NII Article ID
    10004539164
  • NII Book ID
    AN00145000
  • ISSN
    04170326
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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