Study on Discharge Mode Transitions of Cylindrical Inductively Coupled Plasmas.

• YOSHIKI Hiroyuki

  Tsuruoka National College of Technology

Bibliographic Information

Other Title

• 円筒誘導結合型プラズマの放電モード遷移の研究
• エントウ ユウドウ ケツゴウガタ プラズマ ノ ホウデン モード センイ ノ ケンキュウ

Abstract

The mode transitions of cylindrical inductively coupled plasmas have been studied on the basis of the equivalent circuit model included both inductive (H-mode) and capacitive (E-mode) coupling branches. The pure inductive discharge is considered as a co-axial one-turn secondary winding of an air-core transformer, while a capacitive current is assumed to flow from a high voltage coil plate to a grounded electrode via a quartz glass and sheaths. The dependence of the plasma density on RF voltage amplitude is calculated as a function of the ratio of angular excitation frequency to electron-neutral collision frequency, ω/ν_c. It is found that the E-H mode jump with the hysteresis phenomenon occurs at ω/ν_c>1, on the other hand the plasma density continuously increases from E- to H-mode at ω/ν_c<1.

Journal

• Shinku

  Shinku 43 (3), 353-356, 2000

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679040286208
• NII Article ID: 10004561835
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.43.353
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 5361598
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5361598
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed