Kinetic Energy Effects of Oxygen Molecular Beams in Initial Oxidation of Silicon Surfaces

1 References
  • TERAOKA Yuden
    Department of Synchrotron Radiation Research, Japan Atomic Energy Research Institute
  • YOSHIGOE Akitaka
    Department of Synchrotron Radiation Research, Japan Atomic Energy Research Institute
  • SANO Mutsumi
    Department of Synchrotron Radiation Research, Japan Atomic Energy Research Institute

Bibliographic Information

Other Title
  • シリコン表面の初期酸化における酸素分子線の運動エネルギー効果

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Journal

  • 真空

    真空 43 (3), 412-, 2000-03-20

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Details 詳細情報について

  • CRID
    1573105974083690112
  • NII Article ID
    10004561980
  • NII Book ID
    AN00119871
  • ISSN
    05598516
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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