Influence of Ammonia Gas for Electrical Characteristics of Pd Doped TiO_2 Thin Films

• HIOKI Ayako

  Technology Research Institute of Osaka Prefecture

• NATSUKAWA Kazuki

  Technology Research Institute of Osaka Prefecture

• OGAWA Soichi

  Technology Research Institute of Osaka Prefecture

Bibliographic Information

Other Title

• Pd doped TiO_2薄膜の電気的特性に対するアンモニアの影響

Journal

• 真空

  真空 43 (3), 429-, 2000-03-20

Details

• CRID: 1573950399013471872
• NII Article ID: 10004562030
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles