In Situ Analysis of Residues Formed on Inner Surface of Al Etching Chamber

• KAWADA Hiroki

  Mechanical Engineering Research Lab., Hitachi, Ltd.

• YAMANE Miyuki

  Mechanical Engineering Research Lab., Hitachi, Ltd.

• KITSUNAI Hiroyuki

  Mechanical Engineering Research Lab., Hitachi, Ltd.

• TSUMAKI Nobuo

  Mechanical Engineering Research Lab., Hitachi, Ltd.

• YAMASHITA Manabu

  Device Development Center, Hitachi Ltd.

• SUZUKI Shinichi

  Device Development Center, Hitachi Ltd.

Bibliographic Information

Other Title

• Alエッチング装置内壁面の堆積膜のin situ分析

Journal

• 真空

  真空 43 (3), 434-, 2000-03-20

Details

• CRID: 1571980074176498816
• NII Article ID: 10004562046
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles