Ion Fraction in Ti Sputtering

• SAITOH Takayoshi

  AMS R & D C, Kanazawa Institute of Technology

• SAIKI Suguru

  AMS R & D C, Kanazawa Institute of Technology

• FUKUSHIMA Kazuhiro

  AMS R & D C, Kanazawa Institute of Technology

• KIKUCHI Naoto

  AMS R & D C, Kanazawa Institute of Technology

• KUSANO Eiji

  AMS R & D C, Kanazawa Institute of Technology

• NANTO Hidehito

  AMS R & D C, Kanazawa Institute of Technology

• KINBARA Akira

  AMS R & D C, Kanazawa Institute of Technology

Bibliographic Information

Other Title

• TiスパッタリングにおけるTiのイオン分率

Journal

• 真空

  真空 43 (3), 448-, 2000-03-20

Details

• CRID: 1572824499106629632
• NII Article ID: 10004562084
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles