Ion Fraction in Ti Sputtering
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- SAITOH Takayoshi
- AMS R & D C, Kanazawa Institute of Technology
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- SAIKI Suguru
- AMS R & D C, Kanazawa Institute of Technology
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- FUKUSHIMA Kazuhiro
- AMS R & D C, Kanazawa Institute of Technology
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- KIKUCHI Naoto
- AMS R & D C, Kanazawa Institute of Technology
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- KUSANO Eiji
- AMS R & D C, Kanazawa Institute of Technology
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- NANTO Hidehito
- AMS R & D C, Kanazawa Institute of Technology
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- KINBARA Akira
- AMS R & D C, Kanazawa Institute of Technology
Bibliographic Information
- Other Title
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- TiスパッタリングにおけるTiのイオン分率
Search this article
Journal
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- 真空
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真空 43 (3), 448-, 2000-03-20
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Details 詳細情報について
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- CRID
- 1572824499106629632
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- NII Article ID
- 10004562084
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- NII Book ID
- AN00119871
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- ISSN
- 05598516
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- Text Lang
- ja
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- Data Source
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- CiNii Articles