N_2 addition to Ar Discharge Gas in Sputter-Deposition of Polyimid Thin Films

Bibliographic Information

Other Title
  • ポリイミドフィルムのスパッタリングにおける放電ガスへのN_2の添加効果

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Journal

  • 真空

    真空 43 (3), 453-, 2000-03-20

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Details

  • CRID
    1573387449060055552
  • NII Article ID
    10004562099
  • NII Book ID
    AN00119871
  • ISSN
    05598516
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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