巻取方式マグネトロンプラズマ化学蒸着によるダイヤモンド状炭素膜の形成とその特性 Characteristics of Diamondlike Carbon Film Deposited by Magnetron Plasma Enhanced Chemical Vapor Deposition Using a Roll Coater
Diamondlike carbon (DLC) films were deposited at a high deposition rate on various substrates such as metal-evaporated magnetic (ME) tape by magnetron plasma enhanced CVD using a roll coater. The dynamic deposition rate strongly depended on the kind of hydrocarbon gases involved and the magnetic field strength. The maximum dynamic deposition rate was 7500Å·m/min at the magnetic strength of ca. 2.4×10<SUP>4</SUP> A/m using C<SUB>2</SUB>H<SUB>2</SUB> gas. The Raman spectra of the deposited films showed both the G band and D band that characterize a DLC structure. The films were hard with a micro Vickers hardness of 2000. The coeffcient of kinetic friction of the films deposited on the ME tape was 0.060.09, which was smaller than that of an uncoated one, 0.15. Results from scratch tests of the above films showed an excellent durability in comparison with the undeposited tape.
真空 43(5), 599-602, 2000-05-20
The Vacuum Society of Japan