排気の繰返しによるステンレス鋼のベーキング前ガス放出速度の低減

• 尾高 憲二

  (株) 日立製作所機械研究所

• 佐藤 修

  (株) 日立製作所機械研究所

書誌事項

タイトル別名

• Reduction of Outgassing Rate before Baking from Stainless Steel by Evacuation Cycles.
• ハイキ ノ クリカエシ ニ ヨル ステンレス コウ ノ ベーキング ゼン ガス ホウシュツ ソクド ノ テイゲン

抄録

Effect of the number of evacuation cycles at room temperature on outgassing rate before baking was investigated. A test chamber was fabricated of type-304 stainless steel and finished with buff and electrolytic polishing. Seven succesive evacuation cycles without baking reduced the outgassing rate before baking to that obtained after several evacuation cycles including baking at 150 or 200°C (i.e. the well degassed state). Outgassing rate before baking decreased with time t at a rate of t^-α, where α was 1.05 in the first evacuation cycle and increased up to 1.3 after evacuation cycles with baking at 150, 200 or 450°C. This increase in a indicates that the evacuation cycle changes the distribution of adsorption sites with different activation energies of desorption.

収録刊行物

• 真空

  真空 43 (8), 820-823, 2000

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040232064
• NII論文ID: 10004562756
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.43.820
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 5476177
• Web Site: http://id.ndl.go.jp/bib/5476177
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5476177
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可