ホローカソード直流ＣＦ４プラズマ中のＣＦ３，ＣＦ２ラジカル密度計測

DOI Web Site 参考文献12件

書誌事項

タイトル別名
  • Measurement of CF3 and CF2 Radical Densities in a Hollow Cathode DC CF4 Plasma.
  • ホロー カソード チョクリュウ CF4 プラズマ チュウ ノ CF3 CF2 ラジカル ミツド ケイソク

この論文をさがす

抄録

Neutral CF3 and CF2 radicals in a hollow cathode DC CF4 discharge were first detected with a quadrupole mass spectrometer, using the threshold ionization technique. At CF4 pressure of 27 Pa, the densities of both radicals were measured as a function of discharge current over a range of 20-50 mA. CF4 pressure dependences of these radical densities were also measured over a CF4 pressure range of 27-80 Pa. The results showed that the CF3 and CF2 radical densities increased with discharge current. The CF3 radical density increased with CF4 pressure. On the other hand, the CF2 radical density increased up to 40 Pa and then tended to be decrease.

収録刊行物

  • 真空

    真空 42 (7), 647-651, 1999

    一般社団法人 日本真空学会

参考文献 (12)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ