ガスケット変形挙動観察に基づくコンフラットシール機構の考察

• 黒河内 智

  日本バックスメタル株式会社

• 岡部 政之

  日本バックスメタル株式会社

• 斎藤 三良

  株式会社バックス・エスイーブイ

• 篠田 颯男

  株式会社バックス・エスイーブイ

• 森田 晋作

  株式会社バックス・エスイーブイ

書誌事項

タイトル別名

• Reconsideration on ConFlat Seal Mechanism by Gasket Deformation Measurements.
• ガスケット ヘンケイ キョドウ カンサツ ニ モトヅク コンフラットシール キコウ ノ コウサツ

抄録

A ConFlat seal mechanism is most widely used in small and/or middle-sized ultrahigh vacuum system. The existing model on its seal mechanics, however, is somewhat curious and is undoubtedly to be reconsidered.<BR>Our experiments indicated that capturing with the contact of a disk gasket and a retaining counter is not a key factor for the sealing. We tested a taper-seal mechanism, which was newly designed to improve the inefficiency of the ConFlat mechanism. It was remarked under the tightening torque of 50 kgf cm that the seal area on a taper-seal type gasket was 3 times larger than that of a conventional disk gasket. High sealing reliability was thus achieved as expected which is mainly due to its wide seal contact area realized even for rather a hard gasket material.

収録刊行物

• 真空

  真空 42 (10), 910-917, 1999

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679041778432
• NII論文ID: 10004568584
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.42.910
• ISSN: 18809413
• ISSN: 05598516
• ISSN: http://id.crossref.org/issn/05598516
• NDL書誌ID: 4892092
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4892092
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可