Vacuum Technology for a Better Global Environment. Activity for Preventing Global Warming with PFCs on Semiconductor Industries of Japan.

• YABUHARA Youji

  Electronic Industries Association of Japan, Committee for Preventing Global Warming

Bibliographic Information

Other Title

• 真空技術と地球環境　　半導体業界における全フッ素化化合物（ＰＦＣ）と地球温暖化対応
• カイセツ ハンドウタイ ギョウカイ ニ オケル ゼン フッソカ カゴウブツ PFC ト チキュウ オンダンカ タイオウ

Journal

• Shinku

  Shinku 42 (11), 957-963, 1999

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679042054912
• NII Article ID: 10004568624
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.42.957
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 4921560
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4921560
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles