スピニングロ-タ-真空計の渦電流と温度による誤差の解析 Analysis on Eddy Current and Thermal Influence on the Accuracy of a Spinning Rotor Gauge
This paper deals with an analysis on the offset pressure change of a Spinning Rotor Gauge (SRG), which caused by unbalanced eddy current distribution and thermal change in a stainless steel rotor. Themal and electromagnetic analysis method (physical models, equations, simulation algorism) are recognized to have practicability and validity in this analysis that are usefully applied to design a new construction and to operate with carefully treatment.
真空 42(12), 1094-1099, 1999-12-20
The Vacuum Society of Japan