Internal stress of cubic boron nitride thin films prepared by reactive sputtering
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- KANAI Kumiko
- Graduate School of Engineering, Osaka University
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- WAKATSUCHI Masayuki
- Graduate School of Engineering, Osaka University
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- UEDA Yoshio
- Graduate School of Engineering, Osaka University
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- NISHIKAWA Masahiro
- Graduate School of Engineering, Osaka University
Bibliographic Information
- Other Title
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- 反応性スパッタリング法により作成した立方晶窒化硼素薄膜の内部応力
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Journal
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- 高温学会誌
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高温学会誌 25 (4), 6-, 1999-07-20
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Details
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- CRID
- 1571417124199038208
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- NII Article ID
- 10004659582
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- NII Book ID
- AN00080051
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- ISSN
- 03871096
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- Text Lang
- ja
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- Data Source
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- CiNii Articles