A Comparison of Squeeze-Film Theory with Measurements on a Microstructure
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Journal
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- Sensors and Actuators
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Sensors and Actuators 36 79-87, 1993
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Details 詳細情報について
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- CRID
- 1572261549142067840
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- NII Article ID
- 10004831954
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- NII Book ID
- AA1078104X
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- Data Source
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- CiNii Articles