Capacitive Accelerometers without Francture Risk during Fabrication Processes
収録刊行物
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- Digest of Technical Papers. The 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers'93
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Digest of Technical Papers. The 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers'93 814-817, 1993