Measurements of stress-strain diagrams of thin films by a developed tensile machine

• OGAWA H.

収録刊行物

• Proc. of Microlithography and Metrology in Micro-machining

  Proc. of Microlithography and Metrology in Micro-machining 2880 272-279, 1996

詳細情報

• CRID: 1570572699281580416
• NII論文ID: 10004832386
• データソース種別:
  • CiNii Articles