センサ・アクチュエータ用無機能性薄膜プロセス技術 II.磁気センサ用半導体およびGMRの技術動向  [in Japanese] Fabrication Technologies Inorganic Functional Thin Films fo Sensors and Actuators. Trends on Semiconductor Magnetic Sensors and Giast Magnetoresistance Devices.  [in Japanese]

Access this Article

Search this Article

Author(s)

Journal

  • IEEJ Transactions on Sensors and Micromachines

    IEEJ Transactions on Sensors and Micromachines 117(10), 492-496, 1997-10

    The Institute of Electrical Engineers of Japan

References:  45

Codes

  • NII Article ID (NAID)
    10004832598
  • NII NACSIS-CAT ID (NCID)
    AN1052634X
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    13418939
  • NDL Article ID
    4304106
  • NDL Source Classification
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL Call No.
    Z16-B380
  • Data Source
    CJP  NDL  J-STAGE 
Page Top