Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensor applications
Journal
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- Sens.and Actuat.
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Sens.and Actuat. 33 43-45, 1992
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Details 詳細情報について
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- CRID
- 1574231873979310080
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- NII Article ID
- 10004832650
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- Data Source
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- CiNii Articles