A Silicon Micromachined Vibrating Gyroscope with Piezoresistive Detection and Electro-magnetic Excitation

• PAOLETTI F.

収録刊行物

• Proc. The 9th IEEE Int. Workshop on Micro Electro Mechanical Systems

  Proc. The 9th IEEE Int. Workshop on Micro Electro Mechanical Systems 162-167, 1996

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• CRID: 1571417124212182144
• NII論文ID: 10004833398
• データソース種別:
  • CiNii Articles