光学式変位センサを用いた三次元測定機用微小接触プローブの試作 Fabrication of Small Touch Probe for Coordinate Measuring Machine using Optical Displacement Sensor
In recent years there has been growing commercialization of small size devices. The present work describes the method of three-dimensional measuring for small parts by low contact force. Small touch probe consists of quartz sphere (φ0.125mm), stylus (ength 2mm, φ0.lmm), cross sheet (thickness 0.01mm, width 1.25mm) and optical displacement sensor. Touch probe was able to detect the coordinate from transformation of cross sheet center, which was generated at the contact point. Probe touched the object surface, and x, y and z numerical values were obtained. Being employed ring gage, as test specimens, the standard deviation was 1μm.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(4), 240-245, 1998-04-01
The Institute of Electrical Engineers of Japan