Micro-Opto-Mechanical Devices Fabricated by Anisotropic Etching of (110) Silicon.

• UENISHI Y.

収録刊行物

• Proceedings of MEMS'94

  Proceedings of MEMS'94 319 1994

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• CRID: 1570291224304766336
• NII論文ID: 10004833453
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