SEM画像を利用した微細作業支援システムの構築 Operation Support System Driven by SEM Image for Micro Assembly
This paper proposes an operation support system using images of scanning electron microscope (SEM) for micro assembly, which is called "image driven operation system (IDOS)". IDOS works as an interface between an operation site and a micro processing site. The authors designed the following three functions in IDOS for micro assembly using a real time image matching and a SEM magnification controlling: (1) indication of a deformed figure for easy operation, (2) image-driven manipulation using a visual pixel feedback, and (3) automatic operation of tasks which hides low magnification images. Through the experimental pick-and-place task using a 100μm-sized "micro torii" under SEM observation, we evaluated that IDOS worked effectively as intended.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(7), 359-367, 1999-07
The Institute of Electrical Engineers of Japan