Precise Positioning of a Micro Conveyor based on Superconducting Magnetic Levitation
収録刊行物
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- IEEE, 1997 International Symposium on Micromechatronics and human science(MHS97) Nagoya, Japan
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IEEE, 1997 International Symposium on Micromechatronics and human science(MHS97) Nagoya, Japan 131-135, 1997