Ion Energy Measurement in Shielded Vacuum Arc with Graphite Cathode

• MIYANO Ryuichi

  Toyohashi University of Technology

• NAGAYAMA Makoto

  Toyohashi University of Technology

• TAKIKAWA Hirofumi

  Toyohashi University of Technology

• SAKAKIBARA Tateki

  Toyohashi University of Technology

Journal

• Trans. IEE Jpn., A

  Trans. IEE Jpn., A 120 (6), 724-725, 2000-06-01

Keywords

• cathodic arc
• graphite cathode
• ion mass spectrum
• ion energy
• diamond-like carbon film

Details

• CRID: 1573105974207845760
• NII Article ID: 10005321157
• NII Book ID: AN10136312
• ISSN: 03854205
• Text Lang: en
• Data Source:
  • CiNii Articles