A Planar-Type CO₂ Sensor Using NASICON and Perovskite-Type Oxide Thin-Films

• Shimizu Youichi

  Kyushu Institute of Technology

• Soda Takeshi

  Kyushu Institute of Technology

Bibliographic Information

Other Title

• NASICON薄膜を用いたプレーナー型CO₂センサ

Abstract

A planar-type CO₂ sensor using NASICON and perovskite-type oxide thin-films could be prepared by novel solgel methods using aqueous complex and polymer-based precursors, respectively. NASICON thin-film could be fabricated onto alumina substates by spin-coating a tartaric acid-based gel, drying at 150°C, and sintering at 1000°C for 3h. Preparation of perovskite-type oxide thin-films at 500°C was also developed by the use of poiy (vinyl alcohol) (PVA)-acetylacetone polymer precursor. The sensor device combined with LaNiO₃ and NASICON thin-films showed high sensitivity to CO₂ at 300-400°C. The 90% response time to 1000ppm CO₂ was as short as 10-30s at 300-400°C.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 120 (10), 488-489, 2000

  The Institute of Electrical Engineers of Japan

Keywords

• NASICON

Details

• CRID: 1390282679438996992
• NII Article ID: 10005323672
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.120.488
• ISSN: 13475525
• ISSN: 13418939
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/120/10/120_10_488/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed