Photo-electrochemical Deposition of Platinum on TiO<sub>2</sub> with Resolution of Twenty Nanometers using a Mask Elaborated with Electron-Beam Lithography
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- Juodkazis Saulius
- Laboratory of Photonic Nano-materials, The University of Tokushima, 2-1 Minamijyosanjima, Tokushima 770-8506, Japan
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- Yamaguchi Akira
- Laboratory of Photonic Nano-materials, The University of Tokushima, 2-1 Minamijyosanjima, Tokushima 770-8506, Japan
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- Ishii Hidekazu
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijyosanjima, Tokushima 770-8506, Japan
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- Matsuo Shigeki
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijyosanjima, Tokushima 770-8506, Japan
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- Takagi Hitoshi
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijyosanjima, Tokushima 770-8506, Japan
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- Misawa Hiroaki
- Department of Ecosystem Engineering, Graduate School of Engineering, The University of Tokushima, 2-1 Minamijyosanjima, Tokushima 770-8506, Japan
書誌事項
- タイトル別名
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- Photo-electrochemical Deposition of Platinum on TiO2 with Resolution of Twenty Nanometers using a Mask Elaborated with Electron-Beam Lithography.
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抄録
We report the patterning of Pt on a TiO2-rutile single crystal (the fundamental absorption band starts at 396 nm) by direct deposition from a water solution of H2PtCl6 (10-20 mmol/dm3) using laser beam writing at 390-396 nm, or by Hg-lamp illumination (i-line at 365 nm). Pt deposition was corroborated by microchemical analysis. A resolution of the Pt patterning down to 20-30 nm was achieved. To create a Pt pattern with resolution of twenty nanometers, we employed a mask elaborated with electron-beam (EB) drawing lithography. The mask was transparent to the writing illumination. The Pt was reduced from the solution by laser beam scanning over resist-covered regions, while the pattern was formed in the openings of the resist. Separation of the growth and illumination regions, typically, by 0.5-2 μm, facilitates the deposition of reproducible, high-aspect-ratio patterns. It is demonstrated that Pt was deposited through a process of diffusion of the light-excited carriers. The possibility of fabrication of a three-dimensional Pt pattern by the overgrowth of the resist is discussed.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 40 (6A), 4246-4251, 2001
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206254713984
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- NII論文ID
- 210000049717
- 10006205676
- 130004528581
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- NII書誌ID
- AA10457675
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- COI
- 1:CAS:528:DC%2BD3MXkslemtbs%3D
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5820541
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可