Synthesis of Ti-Al Intermetallic Compound Films by Intense Pulsed Ion Beam Evaporation.

  • Suzuki Tsuneo
    Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
  • Kishima Masayuki
    Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
  • Jiang Weihua
    Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
  • Yatsui Kiyoshi
    Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan

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In order to examine the possibility of the synthesis of an intermetallic compound thin film by intense, pulsed, ion beam evaporation (IBE), the synthesis of thin films of Ti-Al system intermetallic compound was attempted. The crystal structure and composition of the films were evaluated. By using a combination target of Ti and Al, thin films of single phase could not be synthesized, while the Ti3Al film was found to be successfully synthesized by using a Ti/Al sintered target. The Ti3Al film was orientated in the 002 plane.

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