Ti(C, N)膜への結合膜とα-Al<SUB>2</SUB>O<SUB>3</SUB>膜のエピタキシャル成長機構の研究

• 石井 敏夫

  日立ツール株式会社成田工場

• 権田 正幸

  日立金属株式会社先端エレクトロニクス研究所

書誌事項

タイトル別名

• Epitaxial Growth Mechanism of a Bonding Layer and an α-Al<SUB>2</SUB>O<SUB>3</SUB> Layer on a Ti(C, N) Layer
• Ti(C,N)膜への結合膜とα-Al2O3膜のエピタキシャル成長機構の研究
• Ti C N マク エ ノ ケツゴウ マク ト アルファ Al2O3 マク ノ エピタキシャル セイチョウ キコウ ノ ケンキュウ
• Epitaxial Growth Mechanism of a Bonding Layer and an &alpha;-Al<SUB>2</SUB>O<SUB>3</SUB> Layer on a Ti(C, N) Layer

抄録

Microstructure of a newly developed “long-tool-life” α-Al₂O₃ coated cutting tool and mechanism of epitaxial growth of the α-Al₂O₃ layer has been investigated. The tool was produced by coating cemented carbide chips with layers of a TiN layer, a Ti(C, N) layer, a bonding layer and an α-Al₂O₃ layer successively and in this order using the techniques of CVD. Cross section TEM analysis revealed the existence of a column in which α-Al₂O₃ grains had grown epitaxially around a protrusion formed around a {111} twin plane in the bonding layer twin which had in turn had grown in a similar way (epitaxially) on a surface of a Ti(C, N) twin, and also the surface of the protrusion is covered with steps on the atomic scale. In addition, SEM and TEM analysis on the surface of the bonding layer revealed that a protrusion had been formed with a vertical-plane shape along with a edge of a {111} twin plane on the surface of a bonding layer twin, and {211} planes of both the bonding layer twin and the protrusion are oriented in tangential directions to the substrate. As {211} planes of face-centered-cubic lattices in general are covered with steps on the atomic scale made up of {111} planes etc, and include the maximum allowed number of atoms on the cross-section of the {111} planes, it is reasonable to conclude that the steps covering the surface of the bonding layer may lead to promotion of the formation of the vertical-plane shape protrusions around the edge of the {111} twin planes through absorbing particles of the recant gases in CVD process at the corner of the steps, and also the steps covering the surface of the protrusion may promote the epitaxial growth of α-Al₂O₃.

収録刊行物

• 日本金属学会誌

  日本金属学会誌 65 (8), 714-719, 2001

  公益社団法人 日本金属学会

キーワード

• alpha type aluminum oxide
• epitaxial growth
• twin; step
• orientation relationship
• face-centered cubic lattice
• chemical vapor deposition
• cemented carbide cutting tool
• bonding layer; titanium carbon nitride

詳細情報

• CRID: 1390282681468265216
• NII論文ID: 10006783233
• NII論文ID: 130007342171
• NII書誌ID: AN00187860
• DOI: 10.2320/jinstmet1952.65.8_714
• ISSN: 18806880
• ISSN: 24337501
• ISSN: 00214876
• NDL書誌ID: 5888631
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5888631
• Web Site: https://www.jstage.jst.go.jp/article/jinstmet1952/65/8/65_8_714/_pdf
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