Observation of microdischarges in high-frequency silent discharge and improvement of ozone generation efficiency

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  • 高周波無声放電のマイクロ放電観測 とオゾン生成効率の改善
  • コウシュウハ ムセイ ホウデン ノ マイクロ ホウデン カンソク ト オゾン セイセイ コウリツ ノ カイゼン

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Abstract

The microdischarge dynamics of high-frequency silent discharge has been studied to improve the ozone generation efficiency. The silent discharges in oxygen atmosphere were generated using a parallel-electrode type and a screw-electrode type geometries. The electric power generators of frequencies of 50kHz, 10kHz and 60Hz were utilized. The ICCD measurement showed that the number of the microdischarge with average diameter of 100μm and average current of 0.65mA increases with the applied voltage.<br>In the screw-electrode type system, highest ozone generation efficiency of 302g/kWh under high ozone concentration 17.1gO3/m3 was attained at an electric power of 13.6W (10kHz) and a O2 gas flow of 4.0l/min.

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