液晶マスクを用いた非積層マイクロ光造形法に関する研究　第１報　　濃淡画像による非積層造形

DOI Web Site 被引用文献11件 参考文献10件

書誌事項

タイトル別名
  • Study on Nonlaminate Micro Stereolithography Using LCD Mask. (1st Report). Nonlaminate Fabrication Using Gray Scale Image.
  • エキショウ マスク オ モチイタ ヒセキソウ マイクロ ヒカリ ゾウケイホウ ニ カンスル ケンキュウ ダイ1ポウ ノウタン ガゾウ ニ ヨル ヒセキソウ ゾウケイ
  • Nonlaminate Fabrication Using Gray Scale Image
  • 濃淡画像による非積層造形

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抄録

This paper presents a new method for fabricating micro structure by applying the stereolithography. This process is characterized by the mask exposure method and the nonlaminate 3-D constructing process for fabricating 3-D object precisely. The exposing method of stereolithography is roughly classified into two categories. One is a laser scanning method, the other is a mask method. The mask method is more suitable for small size parts fabrication than the laser scanning method. However, precise adjustment of many masks is difficult for manufacturing 3-D structures. In this paper, a new stereolithography process for micro manufacturing is proposed, namely stereolithography using liquid crystal display (LCD) mask. Fundamental experiments were performed to verify the proposed method. Both a micro gear with a tooth width of about 80 μm and pyramidal shape 1.5mm in height can be fabricated in a few seconds without lamination. This method enables precise fabrication of various microstructures at high speed as compared with conventional techniques.

収録刊行物

  • 精密工学会誌

    精密工学会誌 67 (4), 628-632, 2001

    公益社団法人 精密工学会

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