New Gauges keeping Beautiful Points of CSL Gauge and AE Gauge.

• KANAJI Toru

  Faculty of Engineering, Kobe University

• YANO Masaya

  Faculty of Engineering, Kobe University

• NAKAMURA Hiroshi

  Faculty of Engineering, Kobe University

• URANO Toshio

  Faculty of Engineering, Kobe University

Bibliographic Information

Other Title

• ＣＳＬゲージとＡＥゲージの特長を組み合わせることの可能性
• CSL ゲージ ト AE ゲージ ノ トクチョウ オ クミアワセル コト ノ

Journal

• Shinku

  Shinku 35 (3), 137-139, 1992

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204064951040
• NII Article ID: 10007953717
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.35.137
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 3768892
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3768892
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles