過渡的な微小圧力変化の光干渉を用いた測定  [in Japanese] Measurement of Pulsed Low Pressure Variation Using Optical Interference Method  [in Japanese]

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Author(s)

Abstract

平板に接近する渦輪が平板上に引き起こす持続時間数100msec, 圧力数Paの過渡的な微小圧力変動を光干渉を用いて高感度で測定する方法を検討した.被測定圧力は厚さが0.2μm, 大きさ2mm角の薄い窒化シリコン製のダイヤフラムに導かれ, ダイヤフラムを変位させる.このダイヤフラムの変位をHe/Neレーザを用いた光干渉により検出する.ダイヤフラムの内部応力を制御することにより, 圧力測定の感度を最適化した.この手法を利用して, 渦輪が接近する平板上の圧力変動を測定した.

Pressure measurement technique for pulsed small pressure variation with duration range of several hundreds msec and the pressure range of several Pa on a flat wall induced by an approaching vortex ring was presented. The pressure variation causes deflection of a thin silicon nitride diaphragm with a thickness of 0.2μm and a size of 2 mm square. The deflection of the diaphragm was measured by optical interference method using a He/Ne laser. A sensitivity was optimized by selecting the internal stress of the diaphragm. This measurement technique was applied to a measurement of pressure variation on a flat wall induced by an approaching vortex ring.

Journal

  • Journal of Japan Society of Fluid Mechanics

    Journal of Japan Society of Fluid Mechanics 11(3), 191-199, 1992-09-30

    The Japan Society of Fluid Mechanics

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Codes

  • NII Article ID (NAID)
    10008003323
  • NII NACSIS-CAT ID (NCID)
    AN00175191
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    02863154
  • Data Source
    CJP  CJPref  J-STAGE 
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