過渡的な微小圧力変化の光干渉を用いた測定

• 田畑 修

  豊田中研

• 村瀬 英寿

  名工大

• 阪野 修

  名工大

• 山田 日出夫

  名工大

書誌事項

タイトル別名

• Measurement of Pulsed Low Pressure Variation Using Optical Interference Method.

抄録

Pressure measurement technique for pulsed small pressure variation with duration range of several hundreds msec and the pressure range of several Pa on a flat wall induced by an approaching vortex ring was presented. The pressure variation causes deflection of a thin silicon nitride diaphragm with a thickness of 0.2μm and a size of 2 mm square. The deflection of the diaphragm was measured by optical interference method using a He/Ne laser. A sensitivity was optimized by selecting the internal stress of the diaphragm. This measurement technique was applied to a measurement of pressure variation on a flat wall induced by an approaching vortex ring.

収録刊行物

• 日本流体力学会誌「ながれ」

  日本流体力学会誌「ながれ」 11 (3), 191-199, 1992

  社団法人 日本流体力学会

キーワード

• Measurement
• Pressure Variation
• Optical Interference
• Vortex Ring

詳細情報

• CRID: 1390001204697368832
• NII論文ID: 10008003323
• NII書誌ID: AN00175191
• DOI: 10.11426/nagare1982.11.191
• ISSN: 21854912
• ISSN: 02863154
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可