シリコン単結晶製造時における融液の流れ  [in Japanese] Melt Flow during Silicon Crystal Growth  [in Japanese]

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Author(s)

Journal

  • ながれ : 日本流体力学会誌

    ながれ : 日本流体力学会誌 13(1), 5-15, 1994-02-28

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Codes

  • NII Article ID (NAID)
    10008003818
  • NII NACSIS-CAT ID (NCID)
    AN00175191
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    02863154
  • Data Source
    CJP 
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